TY  - RPRT
TI  - Application of proof tests to silicon nitride 
AU  - Tighe, N J
AU  - Wiederhorn, S M
AU  - Russell, L R
PY  - 1977
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 77-1202
DO  - 10.6028/NBS.IR.77-1202
ER  -