TY  - RPRT
TI  - A non-contacting length comparator with 10 nanometer precision 
AU  - Hartman, A W
AU  - Rosberry, F W
AU  - Simpson, J Arol
PY  - 1973
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 73-104
DO  - 10.6028/NBS.IR.73-104
ER  -